Equipment vacuum system is mainly composed of vacuum chamber, pump system and control valves and heat exchanger. The pump system is composed of mechanical pump, maintenance pump, roots pump and diffusion pump. The valve comprises a front-level valve (disc valve), a bypass valve (disc valve), a maintenance pump valve (disc valve) and a high valve (plate valve), each valve is a pneumatic valve, controlled by the PLC control pneumatic valve.
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Foshan Nanhai Zhuoda Furnace Industry Co.,Ltd
